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Microwave Electron Cyclotron Resonance Plasmas for materials processing
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A 2.45 GHz, 1.5 kW, Microwave Electron Cyclotron Resonance (ECR) plasma processing facility has been set up to give a uniform deposition on a substrate area of around 100 mm, with features like substrate rotation, substrate heating, deposition under RF bias / pulse bias condition etc. The photo on the left shows the system undergoing tests.
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Chemical Vapour Deposition of Diamond Like Carbon
| A microwave plasma processing facility has been established for depositing diamond like carbon coating (DLC). Optically smooth and hard coatings of DLC have been grown on optically flat Silicon (Si) substrates. The films are found to be excellent insulator with resistivity > 100
Mohms. The photo shows the facility in operation. |
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| Diamond like carbon films deposited by microwave plasma CVD process have been characterized by Raman, FTIR and spectroscopic ellipsometric techniques. The films are found to be transparent in the far infra-red region indicating their potential use as protective coatings on germanium windows. |
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High Power Induction Coupled Plasma Reactor
| A remotely controlled 50 kW RF Induction Plasma Reactor has been developed for materials processing applications. The reactor consists of a high power triode based oscillator, an induction coupled plasma (ICP) torch, reaction chamber and associated vacuum and remote control instrumentation systems. Plasma temperature measurements have also been made in the ICP plasma using spectroscopic technique. |
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Plasma Nitriding of Steel Alloys
| Microwave plasma nitriding and carbonitriding of alloy steel samples has been done in a high pressure (~50 mbar) microwave generated plasma of N2-Ar and N2-CH4-Ar gases respectively. The hardness of the plasma-processed samples is typically four times the hardness of the base substrates. |
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Advanced Ceramic and Metallic Coatings for Nuclear Applications
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Advanced ceramic, metallic and composite coatings on special
metallic substrates and moulds have been developed for specialized
nuclear applications by plasma spray technique. A reactive thermal
plasma process has been developed to convert fly-ash into silicon
carbide and silicon nitride-based composites.
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